Impact of cross-section of 10.4 nm gate length In0.53Ga0.47As FinFETs on metal grain variability

Publication: Congress

1624015042213

June 18, 2021

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- N. Seoane, G. Indalecio, A.J. Garcia-Loureiro and K. Kalna - 10.1109/SISPAD.2016.7605192

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