Congress 1024
Author/s
  • Daniel Nagy, Muhammad A. Elmessary, Manuel Aldegunde, Jari Lindberg, Antonio J. Garcia-Loureiro and Karol Kalna
DOI
Source
  • International Conference on Simulation of Semiconductor Devices and Processes. Washington DC, Estados Unidos. 2015

Multi-Subband Interface Roughness Scattering using 3D Finite Element Monte Carlo with 2D Schodinger Equation for Simulations of sub-16nm FinFETs

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