Scaling/LER study of Si GAA nanowire FET using 3D finite element Monte Carlo simulations

Publication: Article

1624014948476

June 18, 2021

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- Muhammad A. Elmessary , Daniel Nagy, Manuel Aldegunde, Natalia Seoane, Guillermo Indalecio, Jari Lindberg, Wulf Dettmer, Djordje Peric ́, Antonio J. García-Loureiro, Karol Kalna - 10.1016/j.sse.2016.10.018

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