Scaling/LER Study of Si GAA Nanowire FET using 3D Finite Element Monte Carlo Simulations

Publication: Congress

1624015040417

June 18, 2021

/research/publications/scalingler-study-of-si-gaa-nanowire-fet-using-3d-finite-element-monte-carlo-simulations2

- Muhammad A. Elmessary , Daniel Nagy , Manuel Aldegunde, Natalia Seoane, Guillermo Indalecio, Jari Lindberg, Wulf Dettmer, Djordje Peri ́c, Antonio J. Garc ́ıa-Loureiro and Karol Kalna - 10.1109/ULIS.2016.7440050

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