Congress 1050
Author/s
  • Muhammad A. Elmessary , Daniel Nagy , Manuel Aldegunde, Natalia Seoane, Guillermo Indalecio, Jari Lindberg, Wulf Dettmer, Djordje Peri ́c, Antonio J. Garc ́ıa-Loureiro and Karol Kalna
DOI
Source
  • International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon. Viena, Austria. 2016

Scaling/LER Study of Si GAA Nanowire FET using 3D Finite Element Monte Carlo Simulations

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