A 2D model for radiation-hard CMOS annular transistors
Scaling benefits of CMOS processes include the reduction of the oxide thickness, which in turn favors the reduction of threshold voltage shifts due to radiation-induced gate oxide trapped charge. Moreover, experimental results have shown that this inherent radiation hardness of deep submicron processes can be further exploited using gate-enclosed layout transistors with an annular design. For an in-depth analysis of such structures, we present in this paper a 2D analytical I–V model for short-channel annular devices based on the direct solution of the Poisson equation in cylindrical coordinates. The theoretical approach is confirmed with experimental data in a standard CMOS 0.18 μm process.
Palabras clave: radiation-hard CMOS, annular transistors, short-channel effects
Publicación: Artículo
1624014930237
18 de junio de 2021
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Scaling benefits of CMOS processes include the reduction of the oxide thickness, which in turn favors the reduction of threshold voltage shifts due to radiation-induced gate oxide trapped charge. Moreover, experimental results have shown that this inherent radiation hardness of deep submicron processes can be further exploited using gate-enclosed layout transistors with an annular design. For an in-depth analysis of such structures, we present in this paper a 2D analytical I–V model for short-channel annular devices based on the direct solution of the Poisson equation in cylindrical coordinates. The theoretical approach is confirmed with experimental data in a standard CMOS 0.18 μm process. - P. López, B. Blanco-Filgueira, F. Pardo, D. Cabello and J. Hauer - 10.1088/0268-1242/24/12/125009
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