Scaling/LER study of Si GAA nanowire FET using 3D finite element Monte Carlo simulations
Author/s: Muhammad A. Elmessary , Daniel Nagy, Manuel Aldegunde, Natalia Seoane, Guillermo Indalecio, Jari Lindberg, Wulf Dettmer, Djordje Peric ́, Antonio J. García-Loureiro, Karol Kalna
Article · Solid-state Electronics, 2017